|
040 -CATALOGING SOURCE
|
|
a
Original cataloging agency
NEU GrandLibrary
|
|
|
010 -LIBRARY OF CONGRESS CONTROL NUMBER
|
|
a
LC control number
95012433
|
|
|
020 -INTERNATIONAL STANDARD BOOK NUMBER
|
|
a
ISBN
0-12-137940X (alk. paper-)
|
|
|
050 -LIBRARY OF CONGRESS CALL NUMBER
|
|
a
Classification number
TK7871.99.A45
|
|
b
Item number
P55 1995
|
|
|
082 -DEWEY DECIMAL CLASSIFICATION NUMBER
|
|
a
Dewey Classification
621.3815/2
|
|
|
245 -TITLE STATEMENT
|
|
a
Title
Plasma deposition of amorphous silicon-based materials /
|
|
c
Statement of responsibility, etc
edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.
|
|
h
Medium
BOOK
|
|
|
260 -PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
|
|
a
Place of publication, distribution, etc
Boston :
|
|
b
Name of publisher, distributor, etc
Academic Press,
|
|
c
Date of publication, distribution, etc
c1995.
|
|
|
300 -PHYSICAL DESCRIPTION
|
|
a
Extent
xi, 324 p. :
|
|
b
Other physical details
ill. ;
|
|
c
Dimensions
24 cm.
|
|
|
440 -SERIES STATEMENT/ADDED ENTRY--TITLE
|
|
a
Title
Plasma--materials interactions
|
|
|
504 -BIBLIOGRAPHY, ETC. NOTE
|
|
a
Bibliography, etc
Includes bibliographical references and index.
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Silicon alloys
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Amorphous semiconductors
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Plasmaenhanced chemical vapor deposition
|
|
|
700 -ADDED ENTRY--PERSONAL NAME
|
|
a
Personal name
Capezzuto, Pio.
|
|
|
700 -ADDED ENTRY--PERSONAL NAME
|
|
a
Personal name
Madan, Arun.
|
|
|
700 -ADDED ENTRY--PERSONAL NAME
|
|
a
Personal name
Bruno, Giovanni.
|
|
|
856 -ELECTRONIC LOCATION AND ACCESS
|
|
|
|
856 -ELECTRONIC LOCATION AND ACCESS
|
|
|
