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Rapid thermal processing :
Bibliographical information (record 195010)
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Rapid thermal processing :
Subtitle:
 proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 /
Publisher:
Elsevier,
ISBN:
 0080436129
Edition:
 1999.
Classification:
 TK7871.85
Dewey:
 621.3815/2
Additional related names
Detailed notes
    - "Reprinted from Materials science in semiconductor processing, vol. 1/2-4"--T.p. verso.
    - Includes bibliographical references
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Items (1)
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Status
Library
Section
4734055804
Item available
NEU Grand Library2nd Floor (TK7871.85 .S9535 1999)
General Collection
Gifted by: Rüstem Kitabevi
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